THE IMPACT OF THE METHOD OF UNDERLAY SURFACE PROCESSING ON THE DEVELOPMENT OF DEFECTS IN EPITAXIAL COMPOSITIONS IN THE COURSE OF SILICON PHOTO-TRANSDUCERS PRODUCTION
Zoya Nikonova 1, Oksana Nyebesnyuk 1, Alina Nikonova 1, Stanislav Ivanchikov 1, Alexander Zahoda 1
Zoya Nikonova, Oksana Nyebesnyuk, Alina Nikonova, Stanislav Ivanchikov, Alexander Zahoda THE IMPACT OF THE METHOD OF UNDERLAY SURFACE PROCESSING ON THE DEVELOPMENT OF DEFECTS IN EPITAXIAL COMPOSITIONS IN THE COURSE OF SILICON PHOTO-TRANSDUCERS PRODUCTION // Биомедицинская инженерия и электроника. – 2017. – № 3;
URL: www.es.rae.ru/biofbe/ru/212-1112 (дата обращения:
05.01.2025).