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Биомедицинская инженерия и электроника
Электронный научный журнал
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Технические науки
OPTIMIZATION OF THE TECHNOLOGY OF MANUFACTURE OF VARIATIONS WITH OMITTED CONTACTS BASED ON NI AND AL
1. Kherson National Technical University 2. V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
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Abstract: The results of the study of the causes of degradation of inverse VAC of varicosity structures during formation of ohmic contacts on the basis of aluminum and nickel are presented. The data on the optimization of the formation of aluminum and nickel omic contacts through the use of operations of structural defect heatering are given. The technological regimes of creation of hetero domains on varikapnyh structures are resulted DOI: 10.6084/m9.figshare.5687956 Keywords: varicap, gateration, diode structures, ohmic contact |
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