Биомедицинская инженерия и электроника
Электронный научный журнал

Технические науки
OPTIMIZATION OF CLEANING QUARTZ PIPES IN TECHNOLOGY SEMICONDUCTOR ELECTRONICS
Litvinenko V.N. 1, Doschenko G.G. 2, Samoilov N.A. 3

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Abstract:

Influencing of additional treatment of quartz pipes, used for diffusion of the coniferous forest is probed, by aquatic steam on quality of their cleaning. It is shown that application of the developed method of cleaning of quartz pipes is given by possibility substantially to promote efficiency of treatment. The optimum modes of treatment of pipes aquatic steam are resulted.

Keywords: quartz pipe, aquatic steam, cleaning, treatment, diffusion, dioxide of silicon

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